These stages are made for use in 1E-6 Torr vacuum or clean room environments and feature Opto Sigma’s EXC™ precision bearing ways. These bearing ways are not separate parts, as with competing stages, but processed directly into the body and base of the stage resulting in the highest stiffness, straightness and smoothness of any stage on the market. They remain unmatched in overall performance to this day.
TSDS stages are made completely from hardened 440C stainless steel for excellent cleanliness and corrosion resistance. Both the stage and the stainless steel micrometer head (included) have vented attachment holes and are lubricated with a high-grade vacuum grease (YVAC2).
The EXC™ precision stages are based on extended contact ball bearing guides which provides high precision, load capacity, stiffness and durability.
High Load Capacity and High Stiffness
The four-array contact structure achieves high load capacity and high stiffness (13 times stiffer than the V groove).
As shown in Fig-1, ball guides are machined across the arcs so that they have R groove structure and good contact with a ball allowing stable load capacity against the load in the directions where contact with the ball occurs frequently.
High Durability
Long life and free of maintenance
Fig-2 shows the pressure distribution of the R groove and the flat surface. As shown in the figure, pressure exerted on the R groove is dispersed and does not reach inside. Thus, metal fatigue and wear are reduced.
High Precision
The integral (simultaneous) machining achieves high precision (straightness: 0.7 μm or lower)
As shown in Fig-3, the top and bottom plates are integrally and simultaneously machined using an originally devised machining jig to minimize respective machining errors. That is, to maintain high precision, these plates are machined in virtually the same state as when a ball is inside.
